What was the main reason for using Polysilicon rather than other materials for building MEMS structures?

home title Posted by admin on Nov 15th, 2009 | 1 comment home title
The RED girl asked:


What are the advantages of polysilicon?

Nanotech Weapons
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  1. MicroElectroMechanical System says:
    November 19, 2009 at 2:32 am

    Nanotech Manufacturing

    Microelectromechanical systems

    Because semiconductor plants have the equipment and the experience to work with silicon.

    .

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