Microelectromechanical System

microelectromechanical systemWelcome to MicroElectroMechanical System. A microelectromechanical systems (MEMS) describes the technology of the very small, and merges at the nanoscale (billionth of a meter) into nanoelectromechanical systems (NEMS) and Nanotechnology. Common MEMS applications include inkjet printers and components for airbag deployment in cars. A microelectromechanical system is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through microfabrication technology. While the electronics are fabricated using integrated circuit (IC) process sequences, the micromechanical components are fabricated using micro-processes that etch away parts of the silicon wafer or add new structural layers to form the mechanical and electromechanical devices.

Microelectronics can be thought of as the “brains” of a system and MEMS augments this decision-making capability by sensing the environment with “eyes” and “arms”. Sensors gather information and the electronics then process the information. Thank you for visiting and supporting MicroElectroMechanical System.  :-)     :-)

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What was the main reason for using Polysilicon rather than other materials for building MEMS structures?

The RED girl asked:


What are the advantages of polysilicon?

Nanotech Weapons

How to model dome of mems encapsulation with thickness 250um, rdius 3010um,lateral length 2400um?

fadly asked:


3d modeling using matlab, notice that the dome encapsulation have free space for mems movements part at the centre bottom of dome. any body can help me..?

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